| データ種別 | 図書 |
|---|---|
| 出版者 | Amsterdam ; Oxford ; Tokyo : Elsevier |
| 出版年 | 1989 |
| 本文言語 | 英語 |
| 大きさ | xvii, 439 p : ill. ; 25 cm |
書誌詳細を非表示
| 一般注記 | Includes index |
|---|---|
| 著者標目 | 伊藤, 糾次 <イトウ, タダツグ> |
| 件 名 | LCSH:Thin films, Multilayered LCSH:Ion bombardment LCSH:Sputtering (Physics) LCSH:Semiconductor films |
| 分 類 | LCC:QC176.9.M84 DC19:530.4/1 NDC8:428.4 |
| 書誌ID | 1000033668 |
| ISBN | 0444872809 |
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