| Material Type | Books |
|---|---|
| Publisher | Amsterdam ; Oxford ; Tokyo : Elsevier |
| Year | 1989 |
| Language | English |
| Size | xvii, 439 p : ill. ; 25 cm |
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| Notes | Includes index |
|---|---|
| Authors | 伊藤, 糾次 <イトウ, タダツグ> |
| Subjects | LCSH:Thin films, Multilayered LCSH:Ion bombardment LCSH:Sputtering (Physics) LCSH:Semiconductor films |
| Classification | LCC:QC176.9.M84 DC19:530.4/1 NDC8:428.4 |
| ID | 1000033668 |
| ISBN | 0444872809 |
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