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Deposition and growth : limits for microelectronics, Anaheim, CA 1987 / editor, G.W. Rubloff

(AIP conference proceedings;no. 167 . American Vacuum Society series ; 4)
データ種別 図書
出版者 New York : American Institute of Physics
出版年 1988
本文言語 英語
大きさ 388 p. : ill. ; 25 cm

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配架場所 巻 次 請求記号 登録番号 状 態 ISBN 資料種別 利用注記 請求メモ 予約
1F書庫3-洋書
549/R 81 002066418 0883183676 図書

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一般注記 DOE CONF-8711124
Includes bibliographies and index
著者標目 Rubloff, G. W. (Gary W.)
件 名 LCSH:Microelectronics -- Congresses
書誌ID 1000034227
ISBN 0883183676

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