HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY
High vacuum production in the microelectronics industry / Pierre Duval
| データ種別 | 図書 |
|---|---|
| 出版者 | Amsterdam; Tokyo : Elsevier |
| 出版年 | 1988 |
| 本文言語 | 英語 |
| 大きさ | xiii, 222 p. : ill. ; 25 cm |
所蔵情報を非表示
| 配架場所 | 巻 次 | 請求記号 | 登録番号 | 状 態 | ISBN | 資料種別 | 利用注記 | 請求メモ | 予約 |
|---|---|---|---|---|---|---|---|---|---|
| 1F書庫3-洋書 |
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549.09/D 93 | 002063335 | 044442878X | 図書 |
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書誌詳細を非表示
| 一般注記 | Includes index |
|---|---|
| 著者標目 | *Duval, Pierre |
| 件 名 | PRECIS:Microelectronics industries. Applications of vacuum technology |
| 分 類 | DC19:621.5/5 |
| 書誌ID | 1000070070 |
| ISBN | 044442878X |
類似資料
- 1 Journal of vacuum science and technology / American Vacuum Society
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- 4 Nanoelectronics and information technology : advanced electronic materials and novel devices / Rainer Waser, (ed.)
- 5 Deposition and growth : limits for microelectronics, Anaheim, CA 1987 / editor, G.W. Rubloff
- 6 Hard and soft
- 7 Chemical sensors and biosensors for medical and biological applications / Ursula E. Spichiger-Keller
- 8 いのちの始まりと終わりに / 柳澤桂子著
- 9 Makers : the new industrial revolution / Chris Anderson pbk.
- 10 Science and technology of thin films / edited by F. C. Matacotta, G. Ottaviani