Material Type | Journals |
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Publisher | New York : American Institute of Physics |
Language | English |
Notes about History of the Documents | Continued by:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Continued by:Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society |
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Authors | American Vacuum Society |
Subjects | LCSH:Vacuum technology -- Periodicals |
ID | 1000061636 |
ISSN | 00225355 |
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