Material Type | Journals |
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Publisher | New York : American Institute of Physics |
Year | 1983-1990 |
Language | English |
Size | 8 v. : ill. ; 29 cm |
Other titles | abbreviated title:J. vac. sci. technol., B, Microelectronics process. phenom key title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena variant access title:Journal of vacuum science and technology. B, Microelectronics processing and phenomena variant access title:Microelectronics processing and phenomena |
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Notes | Title from cover Issued also on microfilm |
Notes about History of the Documents | Continues:Journal of vacuum science and technology / American Vacuum Society Continued by:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
ID | 1000073780 |
ISSN | 0734211X |
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