Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society
| Material Type | Journals |
|---|---|
| Publisher | New York : American Institute of Physics |
| Year | 1983-1990 |
| Language | English |
| Size | 8 v. : ill. ; 29 cm |
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| Location | Volumes | Year/Date | Barcode No. | Status | Comment | Media type | Request Memo | Check in | Reserve |
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| 1F書庫3-製本雑誌(洋) | 6(1-3) | 1988-1988 | 100046998 |
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| 1F書庫3-製本雑誌(洋) | 5(4-6) | 1987-1987 | 100046986 |
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| 1F書庫3-製本雑誌(洋) | 5(1-3) | 1987-1987 | 100046974 |
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| 1F書庫3-製本雑誌(洋) | 4(4-6) | 1986-1986 | 100046962 |
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| 1F書庫3-製本雑誌(洋) | 4(1-3) | 1986-1986 | 100046950 |
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| Other titles | abbreviated title:J. vac. sci. technol., B, Microelectronics process. phenom key title:Journal of vacuum science & technology. B, Microelectronics processing and phenomena variant access title:Journal of vacuum science and technology. B, Microelectronics processing and phenomena variant access title:Microelectronics processing and phenomena |
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| Notes | Title from cover Issued also on microfilm |
| Notes about History of the Documents | Continues:Journal of vacuum science and technology / American Vacuum Society Continued by:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
| ID | 1000073780 |
| ISSN | 0734211X |
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