HIGH VACUUM PRODUCTION IN THE MICROELECTRONICS INDUSTRY
High vacuum production in the microelectronics industry / Pierre Duval
| Material Type | Books |
|---|---|
| Publisher | Amsterdam; Tokyo : Elsevier |
| Year | 1988 |
| Language | English |
| Size | xiii, 222 p. : ill. ; 25 cm |
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| Location | Volume | Call No. | Barcode No. | Status | ISBN | Media type | Restriction | Request Memo | Reserve |
|---|---|---|---|---|---|---|---|---|---|
| 1F書庫3-洋書 |
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549.09/D 93 | 002063335 | 044442878X | 図書 |
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| Notes | Includes index |
|---|---|
| Authors | *Duval, Pierre |
| Subjects | PRECIS:Microelectronics industries. Applications of vacuum technology |
| Classification | DC19:621.5/5 |
| ID | 1000070070 |
| ISBN | 044442878X |
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