Journal of vacuum science and technology / American Vacuum Society
| Material Type | Journals |
|---|---|
| Publisher | New York : American Institute of Physics |
| Language | English |
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| Location | Volumes | Year/Date | Barcode No. | Status | Comment | Media type | Request Memo | Check in | Reserve |
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| 1F書庫3-製本雑誌(洋) | 21(1-4) | 1982-1982 | 001555163 |
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| 1F書庫3-製本雑誌(洋) | 20(1-4) | 1982-1982 | 001555151 |
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| 1F書庫3-製本雑誌(洋) | 19(1-3) | 1981-1981 | 001555148 |
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| 1F書庫3-製本雑誌(洋) | 18(1-3) | 1981-1981 | 001555136 |
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| 1F書庫3-製本雑誌(洋) | 17(1-6) | 1980-1980 | 001555124 |
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| Notes about History of the Documents | Continued by:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society Continued by:Journal of vacuum science & technology. 2nd series. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society |
|---|---|
| Authors | American Vacuum Society |
| Subjects | LCSH:Vacuum technology -- Periodicals |
| ID | 1000061636 |
| ISSN | 00225355 |
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