IEEE transactions on semiconductor manufacturing : a publication of the IEEE Components, Hybrids, and Manufacturing Technology Society, the IEEE Electron Devices Society, the IEEE Reliability Society, the IEEE Solid-State Circuits Council / Institute of Electrical and Electronics Engineers
| データ種別 | 雑誌 |
|---|---|
| 出版者 | New York, N.Y. : Institute of Electrical and Electronics Engineers |
| 出版年 | c1988- |
| 本文言語 | 英語 |
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| 別書名 | 異なりアクセスタイトル:Institute of Electrical and Electronics Engineers transactions on semiconductor manufacturing |
|---|---|
| 一般注記 | Quarterly Title from cover Also available on microform |
| 著者標目 | IEEE Components, Hybrids, and Manufacturing Technology Society IEEE Electron Devices Society IEEE Reliability Society IEEE Solid-State Circuits Council Institute of Electrical and Electronics Engineers |
| 件 名 | LCSH:Semiconductors -- Design and construction -- Periodicals |
| 書誌ID | 1000062670 |
| ISSN | 08946507 |
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