データ種別 | 雑誌 |
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出版者 | New York : American Institute of Physics |
出版年 | 1983-1990 |
本文言語 | 英語 |
大きさ | 8 v. : ill. ; 29 cm |
別書名 | 略タイトル:J. vac. sci. technol., B, Microelectronics process. phenom キータイトル:Journal of vacuum science & technology. B, Microelectronics processing and phenomena 異なりアクセスタイトル:Journal of vacuum science and technology. B, Microelectronics processing and phenomena 異なりアクセスタイトル:Microelectronics processing and phenomena |
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一般注記 | Title from cover Issued also on microfilm |
変遷注記 | 継続前誌:Journal of vacuum science and technology / American Vacuum Society 継続後誌:Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena |
書誌ID | 1000073780 |
ISSN | 0734211X |