Journal of vacuum science & technology. Second series. B, Microelectronics and nanometer structures, processing, measurement and phenomena
| Material Type | Journals |
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| Publisher | New York : American Institute of Physics |
| Year | 1991- |
| Language | English |
| Size | v. : ill. ; 29 cm |
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| Location | Volumes | Year/Date | Barcode No. | Status | Comment | Media type | Request Memo | Check in | Reserve |
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| 1F書庫3-製本雑誌(洋) | 21(4-6) | 2003- | 310327734 |
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| 1F書庫3-製本雑誌(洋) | 21(1-3) | 2003- | 310327722 |
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| 1F書庫3-製本雑誌(洋) | 20(4-6) | 2002- | 310327710 |
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| 1F書庫3-製本雑誌(洋) | 20(1-3) | 2002- | 310327707 |
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| 1F書庫3-製本雑誌(洋) | 19(4-6) | 2001- | 310327696 |
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| Notes about History of the Documents | Continues:Journal of vacuum science & technology. 2nd series B, Microelectronics processing and phenomena : an official journal of the American Vacuum Society |
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| ID | 1000062492 |
| ISSN | 10711023 |
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